| Title |
Nanostructure and mechanical properties of WC-SiC thin films |
| Authors |
ENDRINO ARMENTEROS, JOSÉ LUIS, Krzanowski J.E. |
| External publication |
Si |
| Means |
JOURNAL OF MATERIALS RESEARCH |
| Scope |
Article |
| Nature |
Científica |
| JCR Quartile |
1 |
| SJR Quartile |
1 |
| JCR Impact |
1.53 |
| SJR Impact |
1.382 |
| Web |
https://www.scopus.com/inward/record.uri?eid=2-s2.0-0036968258&doi=10.1557%2fJMR.2002.0457&partnerID=40&md5=dec47d37f952e70df8fc9272de4b97bd |
| Publication date |
01/01/2002 |
| ISI |
000179614600026 |
| Scopus Id |
2-s2.0-0036968258 |
| DOI |
10.1557/JMR.2002.0457 |
| Abstract |
The mechanical properties of WC-SiC thin films deposited by dual radio frequency magnetron sputtering were investigated. The films were characterized by x-ray photoelectron spectroscopy, x-ray diffraction (XRD), and transmission electron microscopy (TEM) to evaluate the details of the microstructure and degree of amorphization. The results indicate that small additions of SiC (<25%) can significantly increase hardness compared to a pure WC film, but higher SiC contents do not strongly affect hardness. XRD studies show the SiC had a disordering effect. TEM results showed that WC films had coarse porous structure, but films with a low silicon carbide content (approximately 10 to 25 at%) had a denser nanocrystalline structure. Samples with greater than 25% SiC were amorphous. The initial hardness increase at lower SiC contents correlated well with the observed densification, but the transition to an amorphous structure did not strongly affect hardness. |
| Keywords |
Amorphization; Crystal microstructure; Densification; Hardness; Magnetron sputtering; Nanostructured materials; Porosity; Silicon carbide; Transmission electron microscopy; Tungsten carbide; X ray diffraction analysis; X ray photoelectron spectroscopy; Dual radio frequency magnetron sputtering; Nanocrystalline structure; Porous structure; Thin films |
| Universidad Loyola members |
|
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